JPH054000Y2 - - Google Patents
Info
- Publication number
- JPH054000Y2 JPH054000Y2 JP17241285U JP17241285U JPH054000Y2 JP H054000 Y2 JPH054000 Y2 JP H054000Y2 JP 17241285 U JP17241285 U JP 17241285U JP 17241285 U JP17241285 U JP 17241285U JP H054000 Y2 JPH054000 Y2 JP H054000Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- irradiation device
- vacuum
- beam irradiation
- box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241285U JPH054000Y2 (en]) | 1985-11-09 | 1985-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241285U JPH054000Y2 (en]) | 1985-11-09 | 1985-11-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6281100U JPS6281100U (en]) | 1987-05-23 |
| JPH054000Y2 true JPH054000Y2 (en]) | 1993-01-29 |
Family
ID=31108922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17241285U Expired - Lifetime JPH054000Y2 (en]) | 1985-11-09 | 1985-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH054000Y2 (en]) |
-
1985
- 1985-11-09 JP JP17241285U patent/JPH054000Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6281100U (en]) | 1987-05-23 |
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